https://novaprd-lb.newcastle.edu.au/vital/access/manager/Index ${session.getAttribute("locale")} 5 Collocated Z-axis control of a high-speed nanopositioner for video-rate atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23976 Wed 11 Apr 2018 17:53:31 AEST ]]> A compact XYZ scanner for fast atomic force microscopy in constant force contact mode https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11695 Wed 11 Apr 2018 16:57:48 AEST ]]> A micromachined 2DOF nanopositioner with integrated capacitive displacement sensor https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11600 Wed 11 Apr 2018 16:55:56 AEST ]]> Spiral-scan atomic force microscopy: a constant linear velocity approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11574 Wed 11 Apr 2018 16:39:18 AEST ]]> On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30435 Wed 11 Apr 2018 16:36:28 AEST ]]> A switched actuation and sensing method for a MEMS electrostatic drive https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:29957 Wed 11 Apr 2018 16:26:44 AEST ]]> Atomic force microscopy with a 12-electrode piezoelectric tube scanner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11496 Wed 11 Apr 2018 15:42:40 AEST ]]> A novel self-sensing technique for tapping-mode atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:15286 Wed 11 Apr 2018 15:26:57 AEST ]]> Design and control of a single-chip SOI-MEMS atomic force microscope https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30198 Wed 11 Apr 2018 14:54:56 AEST ]]> Multimode Q control in tapping-mode AFM: enabling imaging on higher flexural eigenmodes https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:24097 Wed 11 Apr 2018 14:05:51 AEST ]]> Reducing cross-coupling in a compliant XY nanopositioner for fast and accurate raster scanning https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:10271 Wed 11 Apr 2018 13:53:47 AEST ]]> A Kalman filter for amplitude estimation in high-speed dynamic mode atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28416 Wed 11 Apr 2018 12:55:10 AEST ]]> A hybrid control strategy for vibration damping and precise tip-positioning of a single-link flexible manipulator https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:8717 Wed 11 Apr 2018 12:48:02 AEST ]]> Multi-mode resonant control of a microcantilever for atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19004 Wed 11 Apr 2018 12:39:02 AEST ]]> A new method for robust damping and tracking control of scanning probe microscope positioning stages https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11217 Wed 11 Apr 2018 12:01:14 AEST ]]> Zero displacement microelectromechanical force sensor using feedback control https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18303 Wed 11 Apr 2018 11:59:21 AEST ]]> Stability of signal transformation method for triangular waveform tracking https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11611 Wed 11 Apr 2018 11:59:04 AEST ]]> High-bandwidth multimode self-sensing in bimodal atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:29770 Wed 11 Apr 2018 11:15:56 AEST ]]> Frequency domain analysis of robust demodulators for high-speed atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30196 Wed 11 Apr 2018 10:53:47 AEST ]]> High-bandwidth demodulation in MF-AFM: a Kalman filtering approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28415 Wed 11 Apr 2018 09:39:01 AEST ]]> Novel reciprocal self-sensing techniques for tapping-mode atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19363 Wed 11 Apr 2018 09:33:40 AEST ]]> Kalman filter enabled high-speed control of a MEMS nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:32083 Wed 04 Sep 2019 12:16:53 AEST ]]> Tracking control of constant-linear-velocity spiral reference by LQG method https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:32101 Tue 01 May 2018 12:21:49 AEST ]]> A MEMS nanopositioner with thermal actuator and on-chip thermal sensor https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:12644 Tue 01 May 2018 12:14:58 AEST ]]> Improving the scan rate and image quality in tapping mode Atomic Force Microscopy with piezoelectric shunt control https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:13553 Sat 24 Mar 2018 10:34:44 AEDT ]]> Passive piezoelectric shunt control of an Atomic Force Microscope microcantilever https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:13552 Sat 24 Mar 2018 10:34:44 AEDT ]]> Q control of an atomic force microscope microcantilever: a sensorless approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:13904 Sat 24 Mar 2018 08:25:28 AEDT ]]> An analysis of signal transformation approach to triangular waveform tracking https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:12387 Sat 24 Mar 2018 08:18:01 AEDT ]]> Tracking control of a novel AFM scanner using signal transformation method https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:11636 Sat 24 Mar 2018 08:10:41 AEDT ]]> Development of a MEMS position transducer using bulk piezoresistivity of suspensions https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20461 Sat 24 Mar 2018 08:06:55 AEDT ]]> Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20460 Sat 24 Mar 2018 08:06:55 AEDT ]]> A comparison of two excitation modes for MEMS electrothermal displacement sensors https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18065 Sat 24 Mar 2018 08:06:14 AEDT ]]> MEMS nanopositioner for Lissajous-scan atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20939 Sat 24 Mar 2018 08:06:04 AEDT ]]> A MEMS electromagnetic energy harvester using ultrasonic excitation https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19003 Sat 24 Mar 2018 08:05:34 AEDT ]]> Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19038 Sat 24 Mar 2018 08:05:16 AEDT ]]> Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21381 Sat 24 Mar 2018 08:04:58 AEDT ]]> A comprehensive analysis of MEMS electrothermal displacement sensors https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18291 Sat 24 Mar 2018 08:04:26 AEDT ]]> Frequency modulation technique for MEMS resistive sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20437 Sat 24 Mar 2018 08:03:22 AEDT ]]> MEMS resonator with displacement sensor based on electro-thermal principles https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19464 Sat 24 Mar 2018 08:02:24 AEDT ]]> A new approach to active Q control of an atomic force microscope micro-cantilever operating in tapping mode https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19463 Sat 24 Mar 2018 08:02:22 AEDT ]]> Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19462 Sat 24 Mar 2018 08:02:22 AEDT ]]> Synthesis of modulated-demodulated control systems https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:17364 Sat 24 Mar 2018 08:01:32 AEDT ]]> Design and characterisation of a serial-kinematic nanopositioner for high-speed AFM https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20411 Sat 24 Mar 2018 08:00:54 AEDT ]]> Self-sensing electrostatic drive in a MEMS nanopositioner for the application of vibration control https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:20423 Sat 24 Mar 2018 08:00:51 AEDT ]]> Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21060 Sat 24 Mar 2018 08:00:36 AEDT ]]> Improved electrothermal position sensing in MEMS with non-uniformly shaped heaters https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21059 Sat 24 Mar 2018 08:00:36 AEDT ]]> Ultra low frequency FM sensing of piezoelectric strain voltage https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21061 Sat 24 Mar 2018 08:00:36 AEDT ]]> Improving transient performance of signal transformation approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21048 Sat 24 Mar 2018 08:00:35 AEDT ]]> Minimizing probe loss in tapping mode atomic force microscopy using a switched gain resonant controller https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21863 Sat 24 Mar 2018 07:59:12 AEDT ]]> Control of a piezoelectrically actuated high-speed serial-kinematic AFM nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18940 Sat 24 Mar 2018 07:58:59 AEDT ]]> A negative imaginary approach to modeling and control of a collocated structure https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21830 Sat 24 Mar 2018 07:58:43 AEDT ]]> Signal transformation approach to tracking control with arbitrary references https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21828 Sat 24 Mar 2018 07:58:41 AEDT ]]> Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19956 Sat 24 Mar 2018 07:58:33 AEDT ]]> Active piezoelectric shunt control of an atomic force microscope micro-cantilever https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:17817 Sat 24 Mar 2018 07:57:29 AEDT ]]> A novel piezoelectric strain sensor for simultaneous damping and tracking control of a high-speed nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19887 Sat 24 Mar 2018 07:57:09 AEDT ]]> MEMS rotary microgripper with integrated electrothermal force sensor https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19853 Sat 24 Mar 2018 07:57:07 AEDT ]]> Realization of a class of compensators by modulated-demodulated structures with application in tracking of biased sinusoids https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19786 Sat 24 Mar 2018 07:56:52 AEDT ]]> Integral resonant control for vibration damping and precise tip-positioning of a single-link flexible manipulator https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:17932 Sat 24 Mar 2018 07:56:33 AEDT ]]> Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:17966 Sat 24 Mar 2018 07:56:22 AEDT ]]> A 3-DoF MEMS ultrasonic energy harvester https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19212 Sat 24 Mar 2018 07:54:58 AEDT ]]> Sensorless implementation of a PPF controller for active <i>Q</i> control of an AFM microcantilever https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21082 Q) factor in the atomic force microscope (AFM), when operating in tapping mode, allows for an increase in imaging speed. Passive piezoelectric shunt control has several advantages over alternative methods of cantilever Q factor reduction. However, this technique uses a passive electrical impedance to modify the mechanical dynamics of the cantilever, which limits the amount of Q factor reduction achievable. This paper demonstrates that further reductions in the cantilever Q factor may be obtained with the use of an active impedance in the piezoelectric shunt control framework. The active impedance parameters are designed in such a way that the piezoelectric shunt controller emulates a positive position feedback controller in a displacement feedback control loop. A significant reduction in cantilever Q factor is obtained using an active impedance compared with that achieved with a passive impedance. The improvement in scan speed using this control technique is demonstrated with AFM images of a test sample.]]> Sat 24 Mar 2018 07:53:57 AEDT ]]> Displacement measurement with a self-sensing MEMS electrostatic drive https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21123 rms/√Hz.]]> Sat 24 Mar 2018 07:53:53 AEDT ]]> A feedback controlled MEMS nanopositioner for on-chip high-speed AFM https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18341 Sat 24 Mar 2018 07:52:35 AEDT ]]> Design, modeling, and FPAA-based control of a high-speed atomic force microscope nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19335 Sat 24 Mar 2018 07:52:11 AEDT ]]> Sensorless damping control of a high speed flexure guided nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19365 Sat 24 Mar 2018 07:52:03 AEDT ]]> Simultaneous actuation and sensing for electrostatic drives in MEMS using frequency modulated capacitive sensing https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19367 -1 and exhibited no dynamics up to the 1.2 kHz bandwidth of the MEMS device it was implemented in. The electrostatic drive in this technique is used for both actuation and sensing. This effectively increases the transduction efficiency of both the actuator and sensor as more space on the die can be dedicated to the one drive. Additionally, the scheme allows for one terminal of the drive to be grounded. Thus, this scheme can be used on MEMS devices with more than one drive connected to a common mechanical structure which is electrically grounded.]]> Sat 24 Mar 2018 07:52:02 AEDT ]]> FM-based piezoelectric strain voltage sensor at ultra-low frequencies with wireless capability https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:19439 Sat 24 Mar 2018 07:51:59 AEDT ]]> Bidirectional electrothermal actuator with Z-shaped beams https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:21524 Sat 24 Mar 2018 07:50:28 AEDT ]]> Video-rate lissajous-scan atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18561 Sat 24 Mar 2018 07:50:14 AEDT ]]> Tracking of spiral trajectories beyond scanner resonance frequency by a MEMS nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:26296 Sat 24 Mar 2018 07:40:41 AEDT ]]> Tilted beam piezoresistive displacement sensor: design, modeling, and characterization https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28463 Sat 24 Mar 2018 07:39:34 AEDT ]]> Switched self-sensing actuator for a MEMS nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30616 Sat 24 Mar 2018 07:39:06 AEDT ]]> Force-controlled MEMS rotary microgripper https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:27336 Sat 24 Mar 2018 07:38:30 AEDT ]]> Internal model control for spiral trajectory tracking with MEMS AFM scanners https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:29972 in situ differential electrothermal sensors and electrostatic actuators. This device is used as the scanner stage in an atomic-force microscope. Additional internal model components are included in the controllers to compensate for the residual tracking errors due to plant nonlinearities. In a large scan range with a diameter of 16 µm, we achieved tracking of 1430-Hz spiral sinusoids, a frequency beyond the undamped fundamental resonance of the plant at 1340 Hz. This leads to a video-rate scan speed of 18 frames/s.]]> Sat 24 Mar 2018 07:37:38 AEDT ]]> Design and characterization of a 2-DOF MEMS ultrasonic energy harvester with triangular electrostatic electrodes https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:25965 Sat 24 Mar 2018 07:37:03 AEDT ]]> A 4-DOF MEMS energy harvester using ultrasonic excitation https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28176 Sat 24 Mar 2018 07:36:33 AEDT ]]> Analog implementation of a damping and tracking controller for a high-speed X-Y nanopositioner https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:25726 Sat 24 Mar 2018 07:33:29 AEDT ]]> Noise resilient 2-DoF washout tracking controller for nanopositioning systems subject to sensor drift https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:26383 Sat 24 Mar 2018 07:33:05 AEDT ]]> Cross coupling in parallel kinematic MEMS nanopositioners https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:29614 Sat 24 Mar 2018 07:32:06 AEDT ]]> A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30312 Sat 24 Mar 2018 07:31:49 AEDT ]]> Vibration control with MEMS electrostatic drives: a self-sensing approach https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:26950 Sat 24 Mar 2018 07:27:02 AEDT ]]> Control of a high-speed nanopositioner for lissajous-scan video-rate AFM https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28902 Sat 24 Mar 2018 07:26:01 AEDT ]]> A high-bandwidth MEMS nanopositioner for on-chip AFM: design, characterization, and control https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:26753 Sat 24 Mar 2018 07:24:44 AEDT ]]> A switched gain resonant controller to minimize image artifacts in intermittent contact mode atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:22294 Sat 24 Mar 2018 07:17:29 AEDT ]]> Control methods in data-storage systems https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:22177 Sat 24 Mar 2018 07:16:24 AEDT ]]> Design and control of a MEMS nanopositioner with bulk piezoresistive sensors https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23285 Sat 24 Mar 2018 07:16:21 AEDT ]]> Internal model control for high-speed spiral scan AFM https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:22955 Sat 24 Mar 2018 07:15:22 AEDT ]]> 4-DOF SOI-MEMS ultrasonic energy harvester https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23051 Sat 24 Mar 2018 07:13:49 AEDT ]]> A robust loop-shaping approach to fast and accurate nanopositioning https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23469 H-based loop-shaping control scheme for resonance damping and an integral control for tracking. Experimental raster scans recorded in both open-loop and closed-loop operation are presented to show the substantial increase in positioning performance achieved by the implemented control scheme. It is also shown that the control scheme is robust under relatively large changes in platform resonance, an effect of platform loading.]]> Sat 24 Mar 2018 07:13:01 AEDT ]]> Tracking of triangular references using signal transformation for control of a novel AFM scanner stage https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:22310 Sat 24 Mar 2018 07:11:05 AEDT ]]> On the modeling of tilted fixed-guided flexible beams under tension https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23997 Sat 24 Mar 2018 07:10:21 AEDT ]]> A Z-scanner design for high-speed scanning probe microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23910 Sat 24 Mar 2018 07:10:03 AEDT ]]> A 2-DOF MEMS ultrasonic energy harvester https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:18115 Mon 20 Nov 2023 15:46:46 AEDT ]]> A new scanning method for fast atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:23201 Mon 20 Nov 2023 14:33:17 AEDT ]]> Combining spiral scanning and internal model control for sequential AFM imaging at video rate https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:32204 Mon 14 May 2018 11:46:14 AEST ]]> Tracking of constant-linear-velocity spiral trajectories by approximate internal model control https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:32203 Mon 14 May 2018 11:32:15 AEST ]]> A novel state transformation approach to tracking of piecewise linear trajectories https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:36020 Fri 24 Jan 2020 16:36:08 AEDT ]]> A review of demodulation techniques for amplitude-modulation atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:30249 Fri 24 Aug 2018 09:02:14 AEST ]]> Note: a silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:28174 Fri 10 Nov 2023 15:56:16 AEDT ]]> High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy https://novaprd-lb.newcastle.edu.au/vital/access/manager/Repository/uon:27540 Fri 10 Nov 2023 15:50:28 AEDT ]]>