- Title
- MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Creator
- Maroufi, Mohammad; Fowler, Anthony G.; Reza Moheimani, S. O.
- Relation
- Journal of Microelectromechanical Systems Vol. 24, Issue 6, p. 1730-1740
- Publisher Link
- http://dx.doi.org/10.1109/JMEMS.2015.2434390
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Resource Type
- journal article
- Date
- 2015
- Description
- The design and characterization of a two-degree-of-freedom serial kinematic microelectromechanical systems (MEMS) nanopositioner for on-chip atomic force microscopy (AFM) is reported. A novel design is introduced to achieve a serial kinematic mechanism based on a standard silicon-on-insulator MEMS fabrication process. The nanopositioner comprises a slow axis with a resonance frequency of 2.4 kHz and a fast axis with a resonance frequency of above 4.4 kHz, making it ideal for rastering, as required in the AFM. Strokes of 14 and 9 µm are experimentally achieved for the fast and slow axes, respectively. The serial kinematic design of the stage enables the cross-coupling between the two axes of motion to be as low as -60 dB. Electrothermal displacement sensors are incorporated in the device, which may be used to enable feedback control as required in high-speed AFM. [2014-0248]
- Subject
- nanopositioner; MEMS; atomic force microscopy; serial kinematic mechanism
- Identifier
- http://hdl.handle.net/1959.13/1342260
- Identifier
- uon:28924
- Identifier
- ISSN:1057-7157
- Language
- eng
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