- Title
- Integrated strain and force feedback for high-performance control of piezoelectric actuators
- Creator
- Fleming, Andrew J.; Leang, Kam K.
- Relation
- Sensors and Actuators A: Physical Vol. 161, Issue 1-2, p. 256-265
- Publisher Link
- http://dx.doi.org/10.1016/j.sna.2010.04.008
- Publisher
- Elsevier
- Resource Type
- journal article
- Date
- 2010
- Description
- This paper presents a new sensor arrangement and feedback controller for hysteresis, creep and vibration in piezoelectric actuators. A piezoelectric force sensor is combined with a resistive strain gage to provide both extremely low noise and high stability. The use of a force sensor also results in a system transfer function that exhibits zero-pole ordering. Such systems allow a simple integral controller to provide excellent tracking and damping performance with guaranteed stability. The proposed technique is demonstrated on a nanopositioning platform with a range of 10 μm and a resonance frequency of 2.4 kHz. In closed-loop, the controller damps the resonance by 33 dB and provides a tracking bandwidth of 1.8 kHz. Excellent tracking of a 130 Hz triangular reference and reduction of hysteresis to 0.46% at 10 Hz is also demonstrated. The closed-loop positioning noise, predicted from the sensor noise density, was approximately 0.67 nm peak-to-peak, or 0.0067% of the 10 μm range.
- Subject
- piezoelectric actuators; control; force feedback; strain feedback; hysteresis; nanopositioning
- Identifier
- http://hdl.handle.net/1959.13/923340
- Identifier
- uon:9708
- Identifier
- ISSN:0924-4247
- Language
- eng
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